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ISO 20146:2019 Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges >
ISO 20146:2019 Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges, 2019
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 3.1 Components
- 3.2 Physical parameters
- 3.3 Other parameters
- 4 Symbols and abbreviated terms
- 5 Capacitance diaphragm gauge
- 5.1 Principle
- 6 Specifications for capacitance diaphragm gauge
- 6.1 Type of capacitance diaphragm gauge
- 6.2 Temperature control of gauge head
- 6.3 Display and measurement signal output unit
- 6.4 Measurement range of capacitance diaphragm gauge
- 6.5 Expected measurement uncertainty
- 6.6 Temperature coefficients of zero readings and span
- 6.7 Resolution
- 6.8 Response time of the gauge head
- 6.9 Warm-up period
- 6.10 Admissible pressure (maximum load pressure)
- 6.11 Disruption pressure (burst pressure)
- 6.12 Materials exposed to gas
- 6.13 Mounting orientation of the gauge head
- 6.14 Fitting to chamber
- 6.15 Internal volume
- 6.16 Interface and pin connections
- 6.17 Compatibility between a gauge head and a control unit
- 6.18 Dimension and weight of the gauge head and control unit
- 6.19 Nominal operating (environmental) conditions
- 6.20 Storage and transportation condition
- 6.21 Input power and its requirements
- 7 Additional (optional) specifications for capacitance diaphragm gauge
- 7.1 Reproducibility (long-term instability)
- 7.2 Tilting effect on zero readings
- 7.3 Repeatability of zero
- 7.4 Durability of zero after the pressure of full scale
- 7.5 Durability of span after the pressure of full scale
- 7.6 Durability of zero after the admissible pressure
- 7.7 Durability of span after the admissible pressure
- 7.8 Update interval
- 7.9 Inner diameter of connecting tube
- 7.10 Cable length
- 7.11 Set point of pressure
- 7.12 Photographs
- 7.13 Inspection record and calibration certificate
- 8 Calibration
- 8.1 Calibration procedure
- 8.2 Calibration uncertainty
- 8.3 Calibration certificate
- 9 Measurement uncertainty at use
- Annex A (informative) Compensation of thermal transpiration effect
- Bibliography [Go to Page]