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eLibrary > ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems >

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems, 2022

CONTENTS
Foreword
ASME B5 COMMITTEE ROSTER
CORRESPONDENCE WITH THE B5 COMMITTEE
Section 1 Scope [Go to Page]
1-1 SCOPE
Section 2 References [Go to Page]
2-1 NORMATIVE REFERENCES
2-2 INFORMATIVE REFERENCES
Section 3 Nomenclature [Go to Page]
3-1 NOMENCLATURE [Go to Page]
3-1.1 General
3-1.2 Symbols and Units of Measure
3-1.3 Acronyms
Section 4 Definitions [Go to Page]
4-1 INTRODUCTION
4-2 TERMS AND DEFINITONS
Section 5 Measurement Points, Coordinate Systems, and System Positioning Errors [Go to Page]
5-1 INTRODUCTION
5-2 MEASUREMENT POINT
5-3 CARRIAGE AND BASE COORDINATE SYSTEMS
5-4 CARRIAGE ORIGIN POINT
5-5 SYSTEM POSITIONING ERROR MOTION NOMENCLATURE
5-6 MEASUREMENT POINT TRANSFORMATIONS
Section 6 Environmental Specifications [Go to Page]
6-1 GENERAL
6-2 TEMPERATURE [Go to Page]
6-2.1 General
6-2.2 Thermal Environment Guidelines
6-2.3 Time Variations
6-2.4 Thermal Radiant Energy
6-3 AIR HUMIDITY [Go to Page]
6-3.1 General
6-3.2 Responsibilities
6-3.3 Specifications
6-4 BAROMETRIC PRESSURE [Go to Page]
6-4.1 General
6-4.2 Responsibilities
6-4.3 Specifications
6-5 BASE VIBRATION [Go to Page]
6-5.1 General
6-5.2 Responsibilities
6-5.3 Base Vibrational Parameters
6-6 ELECTRICAL [Go to Page]
6-6.1 General
6-6.2 Responsibilities
6-6.3 Electrical Parameters
6-7 UTILITY AIR [Go to Page]
6-7.1 General
6-7.2 Responsibilities
6-7.3 Specifications
Section 7 Positioning Performance [Go to Page]
7-1 GENERAL
7-2 IN-POSITION JITTER TEST [Go to Page]
7-2.1 General
7-2.2 General Measurement Setup
7-2.3 Measurement Procedure
7-2.4 Data Analysis
7-2.5 Uncertainty Analysis
7-2.6 Presentation of Results
7-3 MOVE-AND-SETTLE TEST [Go to Page]
7-3.1 General
7-3.2 Measurement Setup
7-3.3 Measurement Procedure
7-3.4 Data Analysis
7-3.5 Test Uncertainty Analysis
7-3.6 Presentation of Results
7-4 INCREMENTAL STEP TEST AND MINIMUM INCREMENTAL MOTION TEST [Go to Page]
7-4.1 General
7-4.2 General Measurement Setup
7-4.3 Incremental Step Test
7-4.4 Incremental Step Reversal Error
7-4.5 Minimum Incremental Motion
7-4.6 Test Uncertainty Analysis
7-4.7 Presentation of Results
7-5 STATIC POSITIONING ACCURACY AND REPEATABILITY [Go to Page]
7-5.1 Modes of Operation
7-5.2 Measurement Setup
7-5.3 Measurement Procedure
7-5.4 Data Analysis
7-5.5 Calculation of the Static Positioning Error, Reversal Error, Repeatability and Accuracy
7-5.6 Stroke of Axis
7-5.7 Nomenclature for Performance Metrics Calculated With Corrected Data
7-5.8 Linearity and Hysteresis
7-5.9 Periodic Error of Linear Motion (Partial Travel)
7-5.10 Alternate Informative Methods
7-5.11 Presentation of Results
7-6 CONSTANT VELOCITY AND ACCELERATION TEST [Go to Page]
7-6.1 General
7-6.2 Method for Defining Measurement Targets
7-6.3 Measurement Setup
7-6.4 Measurement Procedure
7-6.5 Data Analysis
7-7 DYNAMIC POSITIONING TESTS [Go to Page]
7-7.1 General
7-7.2 Method for Defining Measurement Targets
7-7.3 Measurement Setup
7-7.4 Measurement Procedure
7-7.5 Data Analysis
7-7.6 Test Uncertainty Analysis
7-7.7 Presentation of Results
Section 8 Geometric Accuracy [Go to Page]
8-1 STRAIGHTNESS ERRORS [Go to Page]
8-1.1 General
8-1.2 Measurement Setup
8-1.3 Measurement Setup
8-1.4 Static Straightness Measurement Procedure
8-1.5 Static Straightness Data Analysis
8-1.6 Presentation of Static Results
8-1.7 Dynamic Straightness Measurement Procedure
8-1.8 Dynamic Straightness Data Analysis
8-1.9 Presentation of Dynamic Results
8-2 ANGULAR ERRORS [Go to Page]
8-2.1 General
8-2.2 Measurement Setup
8-2.3 Measurement Setup
8-2.4 Static Angular Measurement Procedure
8-2.5 Static Angle Data Analysis
8-2.6 Presentation of Static Results
8-2.7 Dynamic Angular Measurement Procedure
8-2.8 Dynamic Angle Data Analysis
8-2.9 Presentation of Dynamic Results
Section 9 Point Repeatability Test [Go to Page]
9-1 GENERAL
9-2 MEASUREMENT SETUP [Go to Page]
9-2.1 General Measurement Setup
9-2.2 Equipment
9-2.3 Functional Point(s), Target position(s), and Sensor Location
9-2.4 Setup Configuration
9-2.5 Measurement Approach Direction(s)
9-2.6 Minimum Displacement
9-2.7 Axial Sensor — Special Cases
9-3 MEASUREMENT PROCEDURE [Go to Page]
9-3.1 General Measurement Procedure
9-3.2 Number of Data Points and Sampling Rate
9-3.3 Data Collection Timing
9-4 DATA ANALYSIS
9-5 TEST UNCERTAINTY ANALYSIS
9-6 PRESENTATION OF RESULTS
Section 10 Servo Characterization [Go to Page]
10-1 GENERAL
10-2 TECHNICAL BACKGROUND [Go to Page]
10-2.1 Signals and Systems
10-2.2 Linearity and Time Invariance
10-2.3 Frequency Response
10-2.4 Inputs and Outputs
10-2.5 Categorizing Frequency Responses
10-3 FREQUENCY RESPONSE MEASUREMENTS [Go to Page]
10-3.1 Equipment
10-3.2 Loop Transmission Measurement Procedure
10-4 STABILITY METRICS
10-5 PRESENTATION OF RESULTS
10-6 SUMMARY
Section 11 Test Equipment and Instrumentation [Go to Page]
11-1 GENERAL
11-2 EXISTING REFERENCES AND STANDARDS
11-3 LINEAR POSITION [Go to Page]
11-3.1 Laser Interferometers
11-3.2 Linear Encoders
11-3.3 Linear Variable Displacement Transformers
11-3.4 Capacitive Sensors
11-3.5 Eddy Current Sensors
11-4 ANGLE [Go to Page]
11-4.1 Laser Interferometers
11-4.2 Autocollimators
11-4.3 Electrolytic Inclinometers
11-4.4 Servo Tiltmeters
11-4.5 MEMS Inclinometer
11-4.6 Position Sensing Detector Sensor
11-5 TEMPERATURE
11-6 BAROMETRIC PRESSURE
11-7 HUMIDITY
11-8 REFRACTIVE INDEX OF AIR
11-9 VIBRATION
11-10 DATA ACQUISITION [Go to Page]
11-10.1 Filters
11-10.2 Triggers
11-11 FIXTURING
Section 12 Uncertainty [Go to Page]
12-1 GENERAL
12-2 RATED OPERATING CONDITIONS
12-3 TEST CONDITIONS
12-4 MEASURAND AND UNCERTAINTY
12-5 MEASUREMENT REPRODUCIBILITY
12-6 EXAMPLE SOURCES OF UNCERTAINTY [Go to Page]
12-6.1 Reference Artifact
12-6.2 Misalignment of Measuring System (Cosine Error)
12-6.3 Temperature
12-6.4 Other Properties of Air
12-6.5 Vibration
12-6.6 Resolution
12-6.7 Uncertainty of RMS Value
Figures [Go to Page]
Figure 5-2-1 Measurement Point (MP)
Figure 5-3-1 Right-Handed Coordinate System Showing Directionality of Motion
Figure 5-3-2 Motion of the Functional Point (FP) With Respect to the Frame Coordinate System (csF)
Figure 5-5-1 Error Motions of a Single-Axis Linear Positioning System Designed to Traverse Along the X-Axis
Figure 7-2.2.2-1 Example Measurement Setup for In-Position Jitter Test in the Z-Direction at Point (dx, dy, dz)
Figure 7-2.6-1 Example of an In-Position Jitter Test Report
Figure 7-3.4.2-1 Example Moving Average Error, Calculated With a Process Window Time of 50 ms
Figure 7-3.4.2-2 Example Moving Standard Deviation, Calculated With a Process Window Time of 50 ms
Figure 7-3.4.2-3 Example Moving Peak Error, Calculated With a Process Window Time of 50 ms
Figure 7-3.5-1 Moving Average Error for Multiple Move-and-Settle Tests
Figure 7-3.6-1 Example of a Move-and-Settle Test Report
Figure 7-4.3.1-1 Example Displacement Vs. Time Plot for an Incremental Step Test With a 2.5 nm Commanded Step Size
Figure 7-4.3.1-2 Illustration of Move-and-Settle Time, tms, and Average Time, tave
Figure 7-4.4-1 Successively Decreasing Steps Used to Measure the Incremental Step Reversal Error
Figure 7-4.7-1 Example of an Incremental Step Test and Minimum Incremental Motion Test Report
Figure 7-5.2.3-1 Illustration of Travel Range and Measurement Range
Figure 7-5.3-1 Example Test Cycle Having m = 10 Points Measured Bidirectionally 5 Times, 5 per Direction and Each Endpoint Measured Unidirectionally 5 Times
Figure 7-5.4.4-1 Abbe Error for Both Pitch Angle, αij, and Yaw Angle, βij, for the Case of Measuring With an Interferometer
Figure 7-5.4.5-1 Examples of Measurement Data With Different Normalizations
Figure 7-5.5-1 Example Mean Bidirectional Positioning Error and Calculation Results
Figure 7-5.8-1 Plot of Linearly Corrected (via Endpoint Linear Normalization) Positioning Deviations Illustrating the Calculation of Linearity of the Axis
Figure 7-5.9.5-1 Plot of Calculated Positioning Deviations Illustrating the Periodic Error P of a Linear Axis
Figure 7-5.10.1-1 Step Test Cycle
Figure 7-5.10.3-1 Example of Position Data Corrected for Drift
Figure 7-5.11-1 Example of a Static Positioning Error and Linearity Test Report
Figure 7-6.5.2-1 Example of a Velocity Profile for a Test Motion
Figure 7-6.5.2-2 Example of Velocity Settling for a Test Motion
Figure 7-6.5.3-1 Example of a Constant Velocity and Acceleration Test Report for a Single Motion
Figure 7-6.5.3-2 Example of Average Metrics for Constant Velocity and Acceleration Test Report
Figure 7-7.3.1-1 Laser Interferometer Example Setup
Figure 7-7.5.1-1 Linear Ramp Motion General Characteristics
Figure 7-7.5.2-1 Example Linear Ramp Motion and Dynamic Positioning Deviation for Three Control Configurations
Figure 7-7.5.2-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Three Control Configurations for Linear Ramp Target Motion
Figure 7-7.5.2-3 Zoomed-In Portion of Example Dynamic Positioning Deviation Near the Final Target Position After t = 0.2 s
Figure 7-7.5.3-1 Sinusoidal Motion General Characteristics
Figure 7-7.5.4-1 Example Sinusoidal Motion and Dynamic Positioning Deviation for Two Control Configurations
Figure 7-7.5.4-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Two Control Configurations for Sinusoidal Target Motion
Figure 7-7.5.4-3 Example Sinusoidal Target Velocity and Target Acceleration for Two Control Configurations
Figure 7-7.7.1-1 Example of a Dynamic Positioning Test Report for a Linear Ramp Motion
Figure 7-7.7.2-1 Example of a Dynamic Positioning Test Report for a Sinusoidal Motion
Figure 7-7.7.2-2 Example of a Dynamic Velocity Test Report for a Sinusoidal Motion
Figure 7-7.7.2-3 Example of a Dynamic Acceleration Test Report for a Sinusoidal Motion
Figure 8-1.1-1 Straightness Error Motions, EYX and EZX, of a Linear Positioning System Designed to Traverse in the X-Direction
Figure 8-1.2.2-1 Setups for Measuring Straightness Using a Displacement Sensor and a Straightedge With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement
Figure 8-1.2.2-2 Setup for Measuring Straightness Using a Straightness Interferometer With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement
Figure 8-1.6-1 Example of a Static Straightness Test Report
Figure 8-1.9-1 Example of a Dynamic Straightness Test Report
Figure 8-2.1-1 Angular Error Motions, EAX, EBX, and ECX, of a Linear Positioning System Designed to Traverse in the X-Direction
Figure 8-2.6-1 Example of a Static Angular Error Test Report
Figure 8-2.9-1 Example of a Dynamic Angular Error Report
Figure 9-2.3-1 The Four Possible Test Cases of the Point Repeatability Test Given the Options for Single or Multiple Functional Points and Target Positions
Figure 9-2.4-1 Setup Configuration — Three-Sensor Nest
Figure 9-2.4-2 Setup Configuration — Single Sensor
Figure 9-2.4-3 Setup Configuration —Two-Sensor Nest
Figure 9-6-1 Example of a Point Repeatability Test Report for a Linear Positioning System
Figure 10-2.3-1 Lumped-Parameter Model of a Mass-Spring-Damper System Driven by a Force
Figure 10-2.3-2 Frequency Response Plot for an Underdamped Mass-Spring-Damper System
Figure 10-2.5.1-1 Basic Control Scheme Used by Many Single-Axis Positioning Systems
Figure 10-3.2-1 Disturbance Signal, w, Injected Into a System Following the Control Algorithm but Before the Power Amplifier Stage
Figure 10-4-1 Examples of the Measures on a Typical Loop Transmission Plot
Figure 10-5-1 Example of a Measured Loop Transmission for a Linear Motion System
Figure 10-5-2 Corresponding Sensitivity Plot for a Measured Loop Transmission for a Linear Motion System
Figure 11-3.1-1 Generic Laser Interferometer Setup for Axial Position Measurement
Figure 11-3.2-1 Generic Linear Encoder Setup for Axial Position Measurement
Figure 11-3.3-1 LVDT Schematic for Axial Position Measurement
Figure 11-4.1-1 Alternate Laser Interferometer Setups for Pitch or Yaw Angular Displacement Measurement
Figure 11-4.2-1 Autocollimator Setup for Angular Displacement Measurement
Figure I-2-1 Relationship of Vectors Between Physically Related Points Under Consideration: oF (Reference Coordinate System), M and P (Carriage)
Figure I-2-2 Associated Coordinate Systems for Fixed Points oF, M, and P
Figure I-2-3 Separation of Related Position Vectors Into System Nominal Positioning (X→), Initial Offsets (MX→), and Displacement Error Vectors (EM→ and EP→) (Combining Positioning and Straightness Deviations)
Figure II-2.1-1 Schematics of Several Displacement Sensors With Capture Fixtures
Figure II-2.3.1-1 Setup for Measuring Influence of Laser Interferometer Optics
Figure II-2.3.2-1 Setup for Measuring Influence of Laser Interferometer System
Tables [Go to Page]
Table 7-3.4.3-1 Move-and-Settle Times for Various Metrics Using a Settling Criteria of 0.05 μm for a Process Window Time of 50 ms
Table 7-5.10.2-1 First 40 Position Values Based on a Sobol Sequence Calculation
Table 10-3.2-1 Dynamic Signal Analyzer Test Parameters to Be Specified
Table 10-5-1 Values to Accompany a Typical Servomechanism Characterization Test
Table 11-3-1 Typical Position Sensor Characteristics
Table 11-4-1 Typical Angle Sensor Characteristics
MANDATORY APPENDIX I MEASUREMENT POINT TO FUNCTIONAL POINT ERROR TRANSFORMATION [Go to Page]
I-1 GENERAL
I-2 DISPLACEMENT ERROR TRANSFORMATION (POSITION AND STRAIGHTNESS)
I-3 PROPAGATION OF ERROR UNCERTAINTY
MANDATORY APPENDIX II ISOLATED SENSOR CHECK [Go to Page]
II-1 GENERAL
II-2 MEASUREMENT SETUP [Go to Page]
II-2.1 Short-Range Displacement Sensors
II-2.2 Autocollimators
II-2.3 Laser Interferometry Systems
II-3 MEASUREMENT PROCEDURE
MANDATORY APPENDIX III SPECIFICATIONS FOR OPERATING CONDITIONS AND PERFORMANCE [Go to Page]
III-1 GENERAL
III-2 GENERAL SPECIFICATIONS FOR SINGLE-AXIS LINEAR POSITIONING SYSTEM
III-3 ENVIRONMENTAL SPECIFICATIONS FOR RATED OPERATING CONDITIONS [Go to Page]
III-3.1 Temperature
III-3.2 Ambient Air
III-3.3 Electrical (Per Each Electrical Supply)
III-3.4 Ambient Vibration
III-3.5 Utility Air (if Applicable)
III-4 SPECIFICATIONS FOR MACHINE PERFORMANCE [Go to Page]
III-4.1 General Test Conditions
III-4.2 In-Position Jitter Test (See Subsection 7-2)
III-4.3 Move and Settle Test (See Subsection 7-3)
III-4.4 Incremental Step Test and Minimum Incremental Motion Test (See Subsection 7-4)
III-4.5 Static Positioning Accuracy and Repeatability (See Subsection 7-5)
III-4.6 Constant Velocity and Acceleration Test (See Subsection 7-6)
III-4.7 Dynamic Positioning Accuracy Tests (See Subsection 7-7)
III-4.8 Straightness Errors (See Subsection 8-1)
III-4.9 Angular Errors (See Subsection 8-2)
III-4.10 Point Repeatability Test (See Section 9)
III-4.11 Servo Characterization (See Section 10) [Go to Page]

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