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BS IEC 62047-46:2025 Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane >
BS IEC 62047-46:2025 Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane, 2025
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- CONTENTS
- FOREWORD
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Requirements [Go to Page]
- Figures [Go to Page]
- 5 Testing method [Go to Page]
- 6 Test report
- Annex A (informative) Examples of tensile strength testing of nanoscale thickness membrane [Go to Page]
- Table A.1 – Size recommendations of nanoscale thickness membrane tensile strength in-situ on-chip tester and corresponding c value [Go to Page]
- Table A.2 – Nanoscale thickness membrane tensile strength test results
- Bibliography [Go to Page]