eLibrary >
ISO 11952:2019 Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems >
ISO 11952:2019 Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems, 2019
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Symbols
- 5 Characteristics of SPMs
- 5.1 Components of an SPM
- 5.2 Metrological categories of SPMs
- 5.3 Block diagram of an SPM
- 5.3.1 For category C:
- 5.3.2 Additionally, for category B:
- 5.3.3 Additionally, for category A:
- 5.4 Calibration interval
- 6 Preliminary characterization of the measuring system
- 6.1 Overview of the instrument characteristics and influencing factors to be investigated
- 6.2 Waiting times after interventions in the measuring system (e.g. instrument installation, intrinsic effects, carrying out operation, warm-up, tip/specimen change)
- 6.2.1 Adjustment of the instrument to ambient conditions
- 6.2.2 Potential causes of drift
- 6.2.3 Procedure
- 6.3 External influences
- 6.3.1 Sources of external influences
- 6.3.2 Consequences of external influences and countermeasures
- 6.4 Summary
- 7 Calibration of scan axes
- 7.1 General
- 7.2 Measurement standards
- 7.2.1 Requirements for measurement standards
- 7.2.2 Handling of measurement standards
- 7.3 Xy-scanner guidance deviations of the x- and y-axes (xtz, ytz)
- 7.3.1 Definition of xy-scanner guidance deviations in vertical direction (z-plane)
- 7.3.2 Measurement strategy
- 7.3.3 Flatness measurement standards
- 7.3.4 Measurements
- 7.3.5 Evaluation of results
- 7.3.6 Summary
- 7.3.7 Extended calibration measurements
- 7.4 Calibration of x- and y-axis (Cx, Cy) and of rectangularity (ϕxy) and determination of deviations (xtx, yty, ywx)
- 7.4.1 General
- 7.4.2 Definition of pitch px and py and rectangularity (ϕxy) in the x-y-plane
- 7.4.3 Measurement strategy
- 7.4.4 Selection of lateral measurement standards
- 7.4.5 Basic calibration — Adjustments and measurements
- 7.4.6 Extended calibrations (scan speed, angle, and eccentric measurements)
- 7.4.7 Evaluation
- 7.4.8 Extended evaluations: nonlinearity of the x-y-axis
- 7.4.9 Summary
- 7.5 Calibration of the z-axis Cz, ϕxz, and ϕyz, and determination of the deviations ztz, zwx, and zwy
- 7.5.1 General
- 7.5.2 Definitions of the step height
- 7.5.3 Measurement strategy
- 7.5.4 Selection of step height measurement standards
- 7.5.5 Basic calibration — Adjustments and measurements
- 7.5.6 Extended calibrations
- 7.5.7 Evaluations
- 7.5.8 Summary
- 7.6 3D measurement standards for alternative and extended calibration
- 7.6.1 General
- 7.6.2 Requirements for 3D measurement standards
- 7.6.3 Selection of the 3D measurement standards
- 7.6.4 Carrying-out of the basic calibration
- 7.6.5 Evaluation of the measurements
- 7.6.6 Extended calibrations
- 7.6.7 Advantages and disadvantages of the 3D measurement standard
- 8 Report of calibration results
- 8.1 General
- 8.2 Equipment used
- 8.3 Statements on ambient conditions
- 8.4 From Clause 5: Preliminary investigations
- 8.5 From Clause 5: Calibration — Details of measurement standards, scan range and scan speed
- 8.6 Further statements
- 9 Uncertainties of measurement
- 9.1 General
- 9.2 Vertical measurand (height and depth)
- 10 Report of results (form)
- Annex A (informative) Example of superposition of disturbing influences in the topography image
- Annex B (informative) Sound investigations: effects of a sound-proofing hood
- Annex C (informative) Thermal isolation effect of a sound-proofing hood/measuring cabin
- Annex D (informative) Handling of contaminations in recorded topography images
- Annex E (informative) Step height determination: comparison between histogram and ISO 5436-1 method
- Annex F (normative) Uncertainty of measurement for lateral measurands (pitch, position, diameter)
- Bibliography [Go to Page]