1. Scope

1.1 This practice describes methods for determining the specimen area contributing to the detected signal in Auger electron spectrometers and some types of X-ray photoelectron spectrometers when this area is defined by the electron collection lens and aperture system of the electron energy analyzer. The practice is applicable only to those X-ray photoelectron spectrometers in which the specimen area excited by the incident X-ray beam is larger than the specimen area viewed by the analyzer, in which the photoelectrons travel in a field-free region from the specimen to the analyzer entrance, and in which an auxiliary electron gun can be mounted to produce an electron beam of variable energy on the specimen.

1.2 This practice is recommended as a useful means for determining the specimen area viewed by the analyzer for different conditions of spectrometer operation, for verifying adequate specimen and beam alignment, and for characterizing the imaging properties of the electron energy analyzer.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E673 Terminology Relating to Surface Analysis

E1016 Guide for Literature Describing Properties of Electrostatic Electron Spectrometers

ISO Standards

Keywords

aperture; auger electron spectroscopy (AES); knife-edge experiments; sharp edge; specimen area; spectrometer; surface analysis; X-ray photoelectron spectroscopy (XPS); Absorbed current; Absorption--spectrochemical instrumentation; Auger electron spectroscopy (AES); Computer programs; Current measurement; Deflection; Detectors; Elastic peak analysis; Line scan; Oscilloscope; Programmable power supplies; Raster scan; Scanning; Signal detection/amplification/measurement; Specimen area; Spectrometry; Surface analysis--spectrochemical analysis; Topography; Voltage; Waveforms; X-ray photoelectron spectroscopy (XPS);

ICS Code

ICS Number Code 71.040.50 (Physicochemical methods of analysis)

DOI: 10.1520/E1217-05

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